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CVD Chemical Vapor Deposition Furnace 1000 Ordm C Melting Heating Furnace

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CVD Chemical Vapor Deposition Furnace 1000 Ordm C Melting Heating Furnace

Model Number : MBF100-10

Range of Applications : Industrial

Type : Electric Holding Furnace

Usage : Ceramic Sintering

Fuel : Electric

Atmosphere : Nitrogen

Effective Chamber Dimensions : 640*640*250mm(W*H*D)

Transport Package : Wooden Packaging

Specification : 1200*1200*1500mm

Trademark : Chitherm

Origin : China

HS Code : 8514101000

Supply Ability : Customized

Customization : Available

Certification : ISO

Place Style : Vertical

Place of Origin : China

Brand Name : Chitherm

MOQ : 1

Price : Negotiable

Packaging Details : Customized

Delivery Time : Customized

Payment Terms : Customized

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Mbf100-10 Type Chemical Vapor Deposition CVD Furnace 1000 ordm C Melting Furnace Heating Furnace ISO Certified Electric Fuel
1.Equipment Name and Model: MBF100-10 Type Chemical Vapor Deposition Furnace.

The MBF100-10 Type Chemical Vapor Deposition (CVD) Furnace is suitable for medium-temperature heat treatment of electronic products. It is primarily used for gas-phase reaction processes of related materials in atmospheres of nitrogen, helium, acetylene, and hydrogen. It can also be utilized for sintering processes of related materials under protective atmospheres.

2.Technical Specifications and Basic Configuration

  1. Rated Temperature: 750°C
  2. Maximum Temperature: 1000°C
  3. Heating Zone Dimensions: 770 × 770 × 300 mm (W × D × H)
  4. Effective Dimensions: 640 × 640 × 250 mm (W × D × H)
  5. Outer Chamber Material: SUS310S
  6. Inner Liner Material: Fused Quartz
  7. Product Size: Φ120
  8. Equipment Capacity: 16 substrates per batch
  9. Maximum Heating Power: 16 kW
  10. Heating Method: Bottom + Four Sides .
  11. Temperature Control Points: Bottom + Side.l
  12. Thermocouple Type: K-Type
  13. Heating Rate: ≤8°C/min
  14. Heating Elements: FEC Ceramic Fiber Heaters
  15. Furnace Door Opening Method: Top-Opening Design
  16. Temperature Control Stability: ±1°C
  17. Temperature Control Instrument: Imported PID Controller with Auto-Tuning Function
  18. Program Steps: 20 steps
  19. Alarm and Protection: Over-temperature, thermocouple breakage, and other audible/visual alarms, with over-temperature power-off protection.
  20. Surface Temperature Rise: <35ºC.
  21. Weight: about 500kg.
  22. Furnace Dimensions: about 1200×1200×1500mm (W×H×D).
CVD Chemical Vapor Deposition Furnace 1000 Ordm C Melting Heating Furnace
3. Delivery List
Item Note QTY
Basic Compositions Furnace 1 unit
Certificates of Inspection Furnace and major purchased components 1 Set
Technical Documents Furnace specifications, technical documents of major purchased components, etc 1 Set
Key Parts Mass Flow Controller (MFC) Yamatake or HORIBA 4 Set
Touch screen 1 PC
Temperature Controller 1 Set
FEC Heater 1 Set
Quartz Liner 1 Set
Spares SSR 1 PC

4. Facility Requirements
4.1 Environmental conditions: Temperature 0 - 40ºC, humidity ≤ 80% RH, no corrosive gas, no strong
airflow disturbance.
4.2 Ground requirements: level, no obvious vibration, bearing capacity > 500Kg/m2 .
4.3 Power conditions: capacity greater than 22kVA, 3 phases 5 lines, voltage 220/380V, frequency
50Hz(according to local situation). Live wire: yellow, green, red, neutral wire: blue, ground wire: yellow-green;
4.4 Installation site: 1500mm×1500mm×3000mm (W×H×D), installation area greater than 2.5m2.

CVD Chemical Vapor Deposition Furnace 1000 Ordm C Melting Heating Furnace

Product Tags:

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